Fluorocarbon rubber gaskets for semiconductors.
FKM fluorocarbon rubber gaskets for semiconductor equipment are made of high-purity fluoroelastomer (Fluoroelastomer, Viton®). They have excellent high temperature resistance and chemical corrosion resistance and are widely used in high-clean, high-precision semiconductor process equipment
with excellent high-temperature resistance.
FKM can withstand operating temperatures of up to 200°C for a long time, and can withstand temperatures up to 250°C instantly. It is particularly suitable for use in high-temperature vacuum chambers or thermal process equipment.
Strong chemical resistance
It can withstand various acids and alkalis, organic solvents, oxidants and corrosive gases, such as hydrofluoric acid (HF), O₃ (ozone) and various cleaning process chemicals, reducing the risk of gasket deterioration.
Excellent air tightness
It has excellent air sealing properties and can prevent gas or chemical gas leakage. It is an indispensable sealing material in high vacuum environments.
Low particle pollution and low metal content
Special formula and clean processing can effectively reduce ion migration and metal pollution, and meet the low metal ion precipitation standards of semiconductor manufacturing processes.
Excellent resistance to compression set (Low Compression Set)
Stable sealing force can still be maintained after long-term use, improving equipment operation stability and lifespan.
Excellent manufacturers ,specializing in the manufacture of rubber and silicone accessories. The rubber ,silicone materials ,provided have passed UL, 、SGS, 、RoHS, 、FDA 、, NFS, 、WRAS 、... and passed the inspection. ,The rubber ,
silicone materials have passed international professional certification, and the rubber and silicone raw materials can withstand the test.
Semiconductor-specific fluorine rubber gasket (FKM) features:
1. Excellent high temperature resistance
Can withstand 200°C~250°C for a long time (special formula can reach 300°C)
Suitable for high-temperature vacuum furnace, heat treatment, and dry etching processes of semiconductor equipment
2. Excellent chemical resistance
Resistant to a variety of corrosive gases and liquids: acids, alkalis, solvents, plasma gases
Especially suitable for cleaning machines, etching/stripping processes, and wet processes (Wet Bench)
3. High cleanliness level
Low metal ions, low pollution emissions, no wafer pollution
Special formulas such as plasma corrosion protection (such as FFKM or Plasma Grade) can be provided
4. Excellent vacuum stability
Low gas transmission rate and low particle generation, suitable for ultra-high vacuum (UHV) applications
Avoid contamination of the process due to gas escape in the vacuum chamber
5. Excellent mechanical properties
Excellent resistance to compression set (CS)
Maintain long-term sealing force and prevent micro-leakage (leakage)
Perfluoroelastomer gasket (FFKM or FFPM) is a high-performance sealing material with excellent chemical resistance and high temperature resistance due to its unique molecular structure. This type of gasket combines the excellent chemical resistance and high temperature stability of polytetrafluoroethylene (PTFE) with the elastomer properties of fluoroelastomer, allowing it to maintain excellent elasticity and sealing effects in extreme environments.
Characteristics of perfluoroelastomer gaskets
1. Excellent chemical resistance: Resistant to almost all chemicals, including strong acids, strong bases, solvents and oxidants.
2. High temperature stability: It has PTFE grade high temperature resistance and can work stably for a long time at temperatures exceeding 300°C.
3. Excellent elastomer properties: Unlike the rigidity of pure PTFE, FFKM has the elasticity of fluororubber, so it can maintain sealing integrity in high temperatures and corrosive environments.
4. Low permeability: It has good gas permeation barrier effect and is suitable for use in vacuum, high pressure and other demanding occasions.
Application occasions
Perfluoroelastomer gaskets are widely used in the chemical industry, oil and gas, semiconductor manufacturing, pharmaceuticals and biomedical fields. Especially in situations where extremely high sealing performance is required, such as high temperature and high pressure reactors, pump valves, chemical processing equipment and precision instruments, FFKM gaskets are an indispensable sealing solution.
Advantages
The durability and anti-corrosion properties of perfluoroelastomer gaskets allow it to provide long-term and stable sealing performance in extreme working environments, reducing equipment maintenance frequency and extending service life.
Jieqin Industrial｜FKM / Viton® fluorine rubber expert｜High fluorine and perfluoroelastomer seals, gaskets, and O-ring manufacturing and processing
Junction (Rubber) Enterprise Co., Ltd. focuses on the production and development of various high-performance fluororubber (FKM/Viton®) products, including O-rings, sealing gaskets, chemical rings, vacuum seals, etc., which are widely used in automobiles, chemicals, aerospace, semiconductors, medical equipment and heavy industries. We provide one-stop OEM/ODM services from raw material selection, mold design to high-precision molding processing, in compliance with international standards such as RoHS, REACH, FDA, etc.
What is FKM fluororubber?
Fluoro Rubber (Fluoro Rubber / FKM / FPM / Viton®) is a fully synthetic polymer elastomer with excellent high temperature resistance, oil resistance, chemical corrosion resistance, fuel resistance and aging resistance. FKM is widely used for sealing and protection in harsh environments, especially in environments in contact with petrochemical solvents, strong acids and alkalis, and fuel oil.
- FKM fluororubber grade classification: based on fluorine content
| Grade | Fluorine content (%) | Characteristics overview | Applicable industries |
| General FKM | About 66% | Standard Viton rubber, with good heat resistance and oil resistance | Automobile, machinery, industrial sealing |
| High fluorine FKM | 67–70% | Improves chemical stability and corrosion resistance, suitable for moderate chemical environments | Chemical equipment, vacuum machinery |
| Perfluorinated FFKM | More than 70% | Extremely chemical-resistant, high-temperature resistant, ultra-low pollution, used in the harshest environments | Semiconductor manufacturing, aerospace, medical equipment |
1. High Fluorine FKM
High fluorine FKM is a fluorine rubber material with a raw rubber fluorine content of **67~70%**. Compared with ordinary grades, it provides better chemical resistance and high temperature stability.
Material properties:
*Extremely high corrosion resistance**: Resistant to strong acids, strong alkalis, organic solvents, and oxidants
*Excellent high temperature resistance**: It can withstand temperatures above 250°C for a long time.
*Good electrical insulation**: used in high-frequency equipment and power industry.
*Anti-pollution, low surface energy**: Not easy to absorb pollution sources and easy to clean.
Application industries:
*Petrochemical equipment sealing
*Sealing rings for high temperature chemical reactors
* Semiconductor wafer process peripherals
* Food grade equipment contact parts (need to comply with FDA)
2. Perfluoroelastomer/FFKM
Perfluoroelastomer FFKM original rubber contains more than **70%** fluorine. It is one of the most chemically resistant rubber materials on the market** and is suitable for use in extreme environments.
Material properties:
*Extreme chemical resistance**: Can be exposed to various types of strong corrosive media for a long time.
*Ultra High Heat Resistance**: Thermal stability up to 300°C.
*Excellent electrical insulation and air tightness**: Suitable for high voltage and vacuum systems.
*Non-toxic, low pollution**: Very suitable for high-cleaning industries such as semiconductors and biomedicine.
Application industries:
* Semiconductor vacuum chamber sealing
* Sealing components for liquid crystal manufacturing equipment
* Biomedical grade suction/diversion O-ring
* High-end petrochemical plant reactor system
Types of FKM products provided by Jieqin Industrial:
| Product Type | Processing Method | Product Features |
| ---------- | ---------- | --------------- |
| FKM O-ring | Molding, injection molding | High temperature and high pressure sealing, acid and alkali resistance |
| FKM gasket | CNC cutting, die-cutting processing | Customized size, good air tightness |
| FKM special-shaped parts | Drawing mold opening, complex structure production | Suitable for special equipment/module packaging |
| Liquid FKM | LSR liquid injection | High cleanliness, high elasticity, suitable for medical and AI |
-Why choose Jieqin Industrial?
* More than 20 years of rubber and silicone manufacturing experience
*Specializes in the production of FKM, FFKM and liquid LSR products
*Passed ISO 9001, RoHS, REACH quality system certification
*Provide customized mold design and rapid prototyping of small quantities of samples
*Supports high cleanliness specifications required for AI modules and semiconductor applications
□ Contact Junction (Rubber) Enterprise Co., Ltd. immediately
We provide the most competitive prices and technical support to help you choose the most suitable fluororubber material solution. Welcome to inquire about sample application, specification drawing design and OEM cooperation!
Origin: Taiwan
Sales method: manufacturing, wholesale, cooperation, export
sales Target market: Taiwan, China, Hong Kong, Singapore, global, Southeast Asia, North America
Inquiry payment method: TT wire
transfer Competition characteristics
Accept unique design or logo: Accept special design or LOGO
Suitable for promotional items or gifts
Various designs: Junction (Rubber) Enterprise Co., Ltd. Provide diversified designs of fluorine rubber gaskets
Fluoro rubber gaskets accept original factory commissioned design and manufacturing ODM
Fluororubber gaskets accept original factory commissioned OEM manufacturing
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Fluorocarbon rubber gaskets for semiconductors.
FKM fluorocarbon rubber gaskets for semiconductor equipment are made of high-purity fluoroelastomer (Fluoroelastomer, Viton®). They have excellent high temperature resistance and chemical corrosion resistance and are widely used in high-clean, high-precision semiconductor process equipment
with excellent high-temperature resistance.
FKM can withstand operating temperatures of up to 200°C for a long time, and can withstand temperatures up to 250°C instantly. It is particularly suitable for use in high-temperature vacuum chambers or thermal process equipment.
Strong chemical resistance
It can withstand various acids and alkalis, organic solvents, oxidants and corrosive gases, such as hydrofluoric acid (HF), O₃ (ozone) and various cleaning process chemicals, reducing the risk of gasket deterioration.
Excellent air tightness
It has excellent air sealing properties and can prevent gas or chemical gas leakage. It is an indispensable sealing material in high vacuum environments.
Low particle pollution and low metal content
Special formula and clean processing can effectively reduce ion migration and metal pollution, and meet the low metal ion precipitation standards of semiconductor manufacturing processes.
Excellent resistance to compression set (Low Compression Set)
Stable sealing force can still be maintained after long-term use, improving equipment operation stability and lifespan.
Excellent manufacturers ,specializing in the manufacture of rubber and silicone accessories. The rubber ,silicone materials ,provided have passed UL, 、SGS, 、RoHS, 、FDA 、, NFS, 、WRAS 、... and passed the inspection. ,The rubber ,
silicone materials have passed international professional certification, and the rubber and silicone raw materials can withstand the test.
Semiconductor-specific fluorine rubber gasket (FKM) features:
1. Excellent high temperature resistance
Can withstand 200°C~250°C for a long time (special formula can reach 300°C)
Suitable for high-temperature vacuum furnace, heat treatment, and dry etching processes of semiconductor equipment
2. Excellent chemical resistance
Resistant to a variety of corrosive gases and liquids: acids, alkalis, solvents, plasma gases
Especially suitable for cleaning machines, etching/stripping processes, and wet processes (Wet Bench)
3. High cleanliness level
Low metal ions, low pollution emissions, no wafer pollution
Special formulas such as plasma corrosion protection (such as FFKM or Plasma Grade) can be provided
4. Excellent vacuum stability
Low gas transmission rate and low particle generation, suitable for ultra-high vacuum (UHV) applications
Avoid contamination of the process due to gas escape in the vacuum chamber
5. Excellent mechanical properties
Excellent resistance to compression set (CS)
Maintain long-term sealing force and prevent micro-leakage (leakage)
Perfluoroelastomer gasket (FFKM or FFPM) is a high-performance sealing material with excellent chemical resistance and high temperature resistance due to its unique molecular structure. This type of gasket combines the excellent chemical resistance and high temperature stability of polytetrafluoroethylene (PTFE) with the elastomer properties of fluoroelastomer, allowing it to maintain excellent elasticity and sealing effects in extreme environments.
Characteristics of perfluoroelastomer gaskets
1. Excellent chemical resistance: Resistant to almost all chemicals, including strong acids, strong bases, solvents and oxidants.
2. High temperature stability: It has PTFE grade high temperature resistance and can work stably for a long time at temperatures exceeding 300°C.
3. Excellent elastomer properties: Unlike the rigidity of pure PTFE, FFKM has the elasticity of fluororubber, so it can maintain sealing integrity in high temperatures and corrosive environments.
4. Low permeability: It has good gas permeation barrier effect and is suitable for use in vacuum, high pressure and other demanding occasions.
Application occasions
Perfluoroelastomer gaskets are widely used in the chemical industry, oil and gas, semiconductor manufacturing, pharmaceuticals and biomedical fields. Especially in situations where extremely high sealing performance is required, such as high temperature and high pressure reactors, pump valves, chemical processing equipment and precision instruments, FFKM gaskets are an indispensable sealing solution.
Advantages
The durability and anti-corrosion properties of perfluoroelastomer gaskets allow it to provide long-term and stable sealing performance in extreme working environments, reducing equipment maintenance frequency and extending service life.
Jieqin Industrial｜FKM / Viton® fluorine rubber expert｜High fluorine and perfluoroelastomer seals, gaskets, and O-ring manufacturing and processing
Junction (Rubber) Enterprise Co., Ltd. focuses on the production and development of various high-performance fluororubber (FKM/Viton®) products, including O-rings, sealing gaskets, chemical rings, vacuum seals, etc., which are widely used in automobiles, chemicals, aerospace, semiconductors, medical equipment and heavy industries. We provide one-stop OEM/ODM services from raw material selection, mold design to high-precision molding processing, in compliance with international standards such as RoHS, REACH, FDA, etc.
What is FKM fluororubber?
Fluoro Rubber (Fluoro Rubber / FKM / FPM / Viton®) is a fully synthetic polymer elastomer with excellent high temperature resistance, oil resistance, chemical corrosion resistance, fuel resistance and aging resistance. FKM is widely used for sealing and protection in harsh environments, especially in environments in contact with petrochemical solvents, strong acids and alkalis, and fuel oil.
- FKM fluororubber grade classification: based on fluorine content
| Grade | Fluorine content (%) | Characteristics overview | Applicable industries |
| General FKM | About 66% | Standard Viton rubber, with good heat resistance and oil resistance | Automobile, machinery, industrial sealing |
| High fluorine FKM | 67–70% | Improves chemical stability and corrosion resistance, suitable for moderate chemical environments | Chemical equipment, vacuum machinery |
| Perfluorinated FFKM | More than 70% | Extremely chemical-resistant, high-temperature resistant, ultra-low pollution, used in the harshest environments | Semiconductor manufacturing, aerospace, medical equipment |
1. High Fluorine FKM
High fluorine FKM is a fluorine rubber material with a raw rubber fluorine content of **67~70%**. Compared with ordinary grades, it provides better chemical resistance and high temperature stability.
Material properties:
*Extremely high corrosion resistance**: Resistant to strong acids, strong alkalis, organic solvents, and oxidants
*Excellent high temperature resistance**: It can withstand temperatures above 250°C for a long time.
*Good electrical insulation**: used in high-frequency equipment and power industry.
*Anti-pollution, low surface energy**: Not easy to absorb pollution sources and easy to clean.
Application industries:
*Petrochemical equipment sealing
*Sealing rings for high temperature chemical reactors
* Semiconductor wafer process peripherals
* Food grade equipment contact parts (need to comply with FDA)
2. Perfluoroelastomer/FFKM
Perfluoroelastomer FFKM original rubber contains more than **70%** fluorine. It is one of the most chemically resistant rubber materials on the market** and is suitable for use in extreme environments.
Material properties:
*Extreme chemical resistance**: Can be exposed to various types of strong corrosive media for a long time.
*Ultra High Heat Resistance**: Thermal stability up to 300°C.
*Excellent electrical insulation and air tightness**: Suitable for high voltage and vacuum systems.
*Non-toxic, low pollution**: Very suitable for high-cleaning industries such as semiconductors and biomedicine.
Application industries:
* Semiconductor vacuum chamber sealing
* Sealing components for liquid crystal manufacturing equipment
* Biomedical grade suction/diversion O-ring
* High-end petrochemical plant reactor system
Types of FKM products provided by Jieqin Industrial:
| Product Type | Processing Method | Product Features |
| ---------- | ---------- | --------------- |
| FKM O-ring | Molding, injection molding | High temperature and high pressure sealing, acid and alkali resistance |
| FKM gasket | CNC cutting, die-cutting processing | Customized size, good air tightness |
| FKM special-shaped parts | Drawing mold opening, complex structure production | Suitable for special equipment/module packaging |
| Liquid FKM | LSR liquid injection | High cleanliness, high elasticity, suitable for medical and AI |
-Why choose Jieqin Industrial?
* More than 20 years of rubber and silicone manufacturing experience
*Specializes in the production of FKM, FFKM and liquid LSR products
*Passed ISO 9001, RoHS, REACH quality system certification
*Provide customized mold design and rapid prototyping of small quantities of samples
*Supports high cleanliness specifications required for AI modules and semiconductor applications
□ Contact Junction (Rubber) Enterprise Co., Ltd. immediately
We provide the most competitive prices and technical support to help you choose the most suitable fluororubber material solution. Welcome to inquire about sample application, specification drawing design and OEM cooperation!
Origin: Taiwan
Sales method: manufacturing, wholesale, cooperation, export
sales Target market: Taiwan, China, Hong Kong, Singapore, global, Southeast Asia, North America
Inquiry payment method: TT wire
transfer Competition characteristics
Accept unique design or logo: Accept special design or LOGO
Suitable for promotional items or gifts
Various designs: Junction (Rubber) Enterprise Co., Ltd. Provide diversified designs of fluorine rubber gaskets
Fluoro rubber gaskets accept original factory commissioned design and manufacturing ODM
Fluororubber gaskets accept original factory commissioned OEM manufacturing
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